Equipment
Room 017 - Main Hall
- Thermal Evaporator (Nano36)
- RIE (PlasmaPro 80)
- PECVD (PlasmaPro 80)
Room 018 - Large Room
Room 019 - Small Room Centre
Room 020 - Small Room Entrance
- Optical Lithography (µMLA)
- Ambient transfer setup
Methods
- Alignment Marks - Wafer