Thermal evaporation system for thin film depostition
deposition of coatings and mutilayer thin films of metals within subnanometric scale
Features:
vacuum chamber able to load up to 8" wafer or multible smaller substrates
3 different evaporation sources
quarz crystal sensor together with a thin film controller (FTC-2000) to control filmthicknes
Material Pellets provided:
Chrome
Gold
Setup history
2017: Purchased (Site Preparation Manual)
Official Documents and Operation
Manuals: User Manual, Manual for FTC Controller, Manual for Inficon User Interface
Quick Operation Guide: nano36_standard-operation-instruction_cr-au_.pdf
Downloads
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Useful Links
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