Equipment and Methods

Angelegt von Bianca Höfer, zuletzt geändert am 12.06.2024

Equipment

Room 017 - Main Hall

- Thermal Evaporator (Nano36)
- RIE (PlasmaPro 80)
- PECVD (PlasmaPro 80)

Room 018 - Large Room

- Nikon LV150
- Ambient transfer setup
- Dual-Beam SEM (Scios 2 - FIB-SEM)
- Raman Spectroscopy (XploraPLUS)
- Glovebox system (Inert PureLab)

Room 019 - Small Room Centre

- Nano Wizard AFM (JPK)
- Ebeam Lithography (Raith Pioneer II)

Room 020 - Small Room Entrance

- Optical Lithography (µMLA)
- Masking Lithography (UV KUB2)

Methods

Alignment Marks - Wafer

Keine Stichwörter