Draw custom shapes on a surface covered with an electron sensitiv film (exposing into a resist)
turnkey EBL system
Direct write and direct view
Minimum linewidth ≤ 8nm
Laser interferometer stage for nm-precise sample positioning control
Proximity effect correction to implement a design on every sample
Setup history
Installed in 2015
06/2020 filament exchange
01/2021 cascade caused EHT switch off and repair of system until July 2021
05/2022 next cascade issue
08/2022 Moving to SupraFan building
during filament exchange Anode was scratched
installation of a new anode
optimising system over 4 Month with outgassing stuff from new anode.
Manuals and Operation
Manuals:
User guide for SEM/EBL (will follow soon):
Patterning with transperent substrates (will follow soon)