Draw custom shapes on a surface covered with an electron sensitiv film (exposing into a resist)

  • turnkey EBL system

  • Direct write and direct view

  • Minimum linewidth ≤ 8nm

  • Laser interferometer stage for nm-precise sample positioning control

  • Proximity effect correction to implement a design on every sample

Setup history

  • Installed in 2015

  • 06/2020 filament exchange

  • 01/2021 cascade caused EHT switch off and repair of system until July 2021

  • 05/2022 next cascade issue

  • 08/2022 Moving to SupraFan building

    • during filament exchange Anode was scratched

    • installation of a new anode

    • optimising system over 4 Month with outgassing stuff from new anode.

Manuals and Operation

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