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Manual Operators Guide
Resist Data Sheets:
AZ 1500
AZ 5214E
- ma-P1210
Developer Data Sheet
- Pattern with alignment marks
Recepies
Recipe by Oguzhan v1_2023
- Recipe by Device Admin
AZ 1514 H (positive resist)
Spin Coating 4000rpm / 60s / 500acc
Soft bake 50s @ 100°C
Dose 135mJ/cm²
Develop 65 – 70s (AZ 726 MIF)
AZ 5214 E (positive mode)
Spin Coating 4000rpm / 60s / 500acc
Soft bake 50s @ 110°C
Dose 80 mJ/cm²
Develop 55 – 70s (AZ 726 MIF)
AZ 5214 E (reversal mode (negative))
Spin Coating 4000rpm / 60s / 500acc
Soft bake 50s @ 110°C
Dose 90 mJ/cm²
reverse bake 2min @ 120°C
Flood Exposure 30s @ 100% power (with KUB2)
Develop 55 – 70s (AZ 726 MIF)
