Seitenhistorie

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• 07/2022 - Installation

• 11/2022 - Camera problem - no switching between overview and zoom

• 06/2023 - Camera problem solved
• 06/2024 - Focus (defoc) not working properly, contact HI, solved

Manuals

• Manual Operators Guide

• Pattern with alignment marks
• Pattern on blank sample
• Tricks, like pattern without alignment marks

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• Resist Data Sheets:

  • AZ 1512 (SDS, TDS)

  • AZ 5214E (SDS, TDS)

  • ma-P1210 (SDS, TDS)
  • TI-Prime (Adhesion) (SDS, TDS)

• Developer Data Sheet

  • AZ 726 MIF (SDS, TDS)

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