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07/2022 - Installation
11/2022 - Camera problem - no switching between overview and zoom
- 06/2023 - Camera problem solved
- 06/2024 - Focus (defoc) not working properly, contact HI, solved
Manuals
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Resist Data Sheets:
Developer Data Sheet
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07/2022 - Installation
11/2022 - Camera problem - no switching between overview and zoom
...
Resist Data Sheets:
Developer Data Sheet
...