Thermal evaporation thin film depostition system.
coatings and deposition of mutilayer thin films of metals within subnanometric scale
equiped with:
vacuum chamber able to load up to 8" wafer or multible smaller substrates
3 different evaporation sources
quarz crystal sensor together with a thin film controller (FTC-2000) to control filmthicknes
Material Pellets provided:
Chrome
Gold
Setup history
The setup was installed in 2017 (?) (Site Preparation Manual)
