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07/2022 - Installation
11/2022 - Camera problem - no switching between overview and zoom
- 2023 - Camera problem solved
Manuals
Documents
Resist Data Sheets:
AZ 1500
AZ 5214E
- ma-P1210
- TI-Prime (Adhesion)
Developer Data Sheet
Recepies
- Recipe by Oguzhan v1_2023
- Recipe by Device Admin
AZ 1514 H (positive resist)
Spin Coating 4000rpm 4000 rpm / 60s 60 s / 500acc500 acc
Soft bake 50s @ 100°CBake 50 s @ 100 °C
Dose 135mJ135 mJ/cm²
- Defoc -6
Develop 65 – 70s 70 s (AZ 726 MIF)
AZ 5214 E (reversal resist (positive mode))
Spin Coating 4000rpm 4000 rpm / 60s 60 s / 500acc500 acc
Soft bake 50s @ 110°CBake 50 s @ 110 °C
Dose 80 mJ/cm²
- Defoc -6
Develop 55 – 70s 70 s (AZ 726 MIF)
AZ 5214 E (reversal mode resist (negative mode))
Spin Coating 4000rpm 4000 rpm / 60s 60 s / 500acc500 acc
Soft bake 50s @ 110°CBake 50 s @ 110 °C
Dose 90 mJ/cm²
- Defoc -6
Reverse Bake 2 min @ 120 °Creverse bake 2min @ 120°C
Flood Exposure 30s 30 s @ 100% power Power (with KUB2)
Develop 55 – 70s (AZ 726 MIF)
- ma-P1210 (for electrode size/distance 1:1)
Spin Coating 3000 rpm / 30 s / 500 acc
Soft bake 60 s @ 100 °C
Dose 82 mJ/cm²
- Defoc -6
Develop 60 s (AZ 726 MIF)
- ma-P1210 (for electrode size/distance 1:4)
Spin Coating 3000 rpm / 30 s / 500 acc
Soft bake 60 s @ 100 °C
Dose 87 mJ/cm²
- Defoc -6
Develop 60 s (AZ 726 MIF)
- Recipe by Oguzhan v1_2023