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- Thermal Evaporator (Nano36)
- RIE (PlasmaPro 80)
- PECVD (PlasmaPro 80)
Room 018 - Large Room
Room 019 - Small Room Centre
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- Optical Lithography (µMLA)Ambient transfer setup
- Masking Lithography (UV KUB2)
Methods
- Alignment Marks - Wafer
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Room 018 - Large Room
Room 019 - Small Room Centre
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